适合什么需求Good For
超表面、光栅、MEMS、微流控、光电子器件、电极、薄膜图形、深硅刻蚀、纳米压印母版和早期样品验证。Metasurfaces, gratings, MEMS, microfluidics, photonics, electrodes, film patterns and prototype samples.
专业词入口Topic Entry
微纳加工需求，不要一上来只问“能不能做”。Micro-nano fabrication starts with route judgment.
微纳加工通常不是单个设备就能解决的问题。材料、版图、关键尺寸、膜层、刻蚀深度、SEM 验收、封装测试和样品数量，会共同决定应该找电子束曝光、光刻、刻蚀、镀膜、Lift-off、键合还是表征资源。Micro/nano fabrication usually depends on materials, layout, critical dimensions, films, etch depth, SEM acceptance, packaging, testing and sample quantity.
先准备什么Prepare First
GDS/DXF/截图、材料堆栈、最小线宽、加工面积、目标深度或膜厚、样品尺寸、数量、可承受温度和验收方式。Layout, stack, CD, area, depth or film thickness, chip size, quantity, process limits and acceptance method.
常见卡点Common Risks
只给效果图、没有解理道、版图单位不清、材料不能承受清洗或等离子体、SEM 验收标准后置，都会拉长沟通周期。Render-only inputs, missing cleaving streets, unclear units, fragile materials and late metrology rules all slow the project.
推荐下一步Next Step
先把需求翻译成工艺路线，再找资源。Translate the request into a route before matching resources.
微纳Hub 可以先帮你判断：这类结构更像电子束曝光、光刻、刻蚀、镀膜 Lift-off、纳米压印、键合封装，还是 SEM/AFM 表征问题。资料不完整也可以先发，重点是把缺口列出来。MN Fab Hub can first judge whether the project is closer to EBL, lithography, etch, films, lift-off, nanoimprint, packaging or metrology.
提交微纳加工需求Submit fabrication request