适合看什么What SEM Checks
线宽、周期、孔径、侧壁、残胶、塌陷、膜层覆盖、刻蚀深度、截面形貌和局部缺陷。不同目标需要不同拍摄方式。CD, period, aperture, sidewall, residue, collapse, film coverage, etch depth, cross-section and defects.
专业词入口Topic Entry
SEM 表征不是“拍张好看的图”这么简单。SEM metrology is more than a nice image.
微纳加工结果常用 SEM 表征，但展示图、测量图和验收图不是一回事。要提前说明看俯视还是截面、测线宽还是深度、是否需要倾斜角、是否要看残胶/侧壁/膜层，以及比例尺和原始数据怎么交付。SEM images for display, measurement and acceptance serve different purposes. Define view, dimension, scale and deliverables early.
先准备什么Prepare First
样品尺寸、导电性、是否能喷金、关注区域、版图坐标、目标尺寸、需要几张图、是否要截面或 FIB 辅助。Sample size, conductivity, coating limits, region of interest, layout coordinates, target dimensions and cross-section needs.
验收要说清Acceptance Rules
比例尺、放大倍数、测量线位置、统计数量和原图交付要提前定义。示意图或风格图不能当真实实验结果。Scale bar, magnification, measurement line, statistics and raw image delivery should be defined early.
推荐下一步Next Step
把“想证明什么”写出来，比只说“拍 SEM”更重要。State what you need to prove, not just “take SEM”.
如果 SEM 是为了加工验收，请同时给目标尺寸、容差、关注区域和后续测试方式。微纳Hub 可以帮你把“拍图需求”翻译成更清楚的表征和验收输入。If SEM is for acceptance, provide target dimensions, tolerance, region of interest and downstream test needs.
提交 SEM 表征需求Submit SEM request