半导体漏电流测试与低电流I-V测试Semiconductor leakage current and low-current I-V testing

适合什么需求Suitable projects

本专题面向二极管反向漏电、栅介质漏电及高阻器件低电流I-V测量的送样沟通。微纳Hub建议把“指定偏压下测漏电”与“寻找击穿点”分成不同任务，先明确样品是否允许承受不可逆应力，再确认测试范围。This guide supports project discussions for diode reverse leakage, gate dielectric leakage and low-current I-V measurements of high-resistance devices. MN Fab Hub recommends separating leakage at a specified bias from breakdown exploration and agreeing on allowable sample stress before selecting a test scope.

询价前准备哪些资料Quotation inputs

请提供器件类型、材料与膜层、端子定义与极性、焊盘尺寸及照片、样品数量和点位图；如需电流密度，补充有效面积与单位。微纳Hub建议同时给出预期电流量级、目标偏压、可接受限流和已有异常曲线，以便匹配探针、夹具及报告范围。Provide device type, material stack, terminal definitions and polarity, pad dimensions and photographs, sample count and site map. For current density, supply the effective area and units. MN Fab Hub recommends stating the expected current scale, target bias, allowed current limit and existing anomalous curves to match fixtures and reporting scope.

试测前约定条件Conditions to agree before a pilot test

微纳Hub建议明确扫压起止、步长、方向、每点等待时间、积分设置、限流、温度与光照，以及是否需要固定偏压下的电流随时间记录。先选代表点试测，再约定批量点位和重复次数；设备的标称分辨率不应直接作为整套系统的检出能力承诺。MN Fab Hub recommends agreeing on bias endpoints, step, direction, settling time, integration settings, current limit, temperature, illumination and any current-versus-time measurement at fixed bias. Start with representative sites before defining batch coverage and repeats; instrument resolution alone is not a system detection-limit guarantee.

系统漏电与稳定时间System leakage and settling

低电流测量需核查仪器、线缆、夹具与探针构成的完整系统。绝缘漏电会混入测量结果；guard可减小相关漏电误差，屏蔽与充分等待也有助于改善测量。[1] 微纳Hub建议记录空载背景和稳定过程；背景接近样品读数时标注测量限制，不直接认定为器件缺陷。Assess the complete instrument, cable, fixture and probe system. Insulation leakage can add to measured current; guarding reduces associated errors, while shielding and adequate settling help measurement quality. [1] MN Fab Hub recommends recording background and settling behavior and reporting limitations when background approaches the sample reading.

验收清单与下一步Acceptance and next step

微纳Hub建议交付原始电压、电流及时间数据，保留正负号、量程、限流触发标记、接线图、环境条件、点位编号和重复性结果。将原始电流与面积归一化数据分开保存，异常点说明复测过程。提交结构与目标后，先确认可测性、试测方案、周期和报价。MN Fab Hub recommends delivering raw voltage, current and time data with signs, ranges, compliance flags, wiring, environmental conditions, site IDs and repeatability. Keep raw current separate from area-normalized data and document retests of anomalous sites. Submit the structure and goals to confirm feasibility, pilot scope, schedule and quotation.

资料来源References

核查日期：2026-09-28。下列厂商方法资料用于原理参考；送样与验收清单为微纳Hub项目沟通建议，不构成设备能力承诺。Checked September 28, 2026. The manufacturer reference supports method principles; submission and acceptance lists are MN Fab Hub project guidance, not capability guarantees.

• [1] Tektronix / Keithley — Optimizing Low Current Measurements