Lab Equipment RoutingLab Equipment Routing

先说样品和工艺,再谈设备配置。Start with the sample and process, then configure the equipment.

面向高校课题组和企业研发实验室,提供小型工艺设备的需求梳理、配置建议和合作资源对接。当前优先覆盖精密热台、桌面涂胶与显影方向。Requirement review, configuration planning and resource matching for compact laboratory process equipment, currently focused on precision hot plates and benchtop coating/developing.

01

精密热台Precision Hot Plate

适合光刻胶软烘/硬烘、样品加热和研发工艺验证。选型时重点核对工作面尺寸、目标温区、面内均匀性、固定方式、程序控制和洁净兼容性。For resist bake, sample heating and R&D validation. Key inputs include surface size, temperature range, uniformity, sample holding, programs and clean compatibility.

02

桌面涂胶/显影Benchtop Coat/Develop

适合晶圆、方片、碎片及异形样品。选型时重点核对尺寸范围、转速与程序、吸盘、胶液/显影液兼容、排液排风和交叉污染控制。For wafers, coupons, fragments and non-standard substrates. Review size, spin programs, chucks, chemical compatibility, drainage, exhaust and contamination control.

03

成套前处理条件Compact Process Set

如果目标是把涂胶、烘烤、显影环节放回实验室,可按样品、频率、安装环境、预算和交期一起梳理,不用先指定某个型号。For bringing coating, bake and develop in-house, start from samples, usage, utilities, budget and timeline rather than a model number.

需要准备Inputs

六项信息,足够开始判断。Six inputs are enough to start.

合作边界Scope

这是选型与采购资源对接,不把合作设备写成自研自产。This is configuration and sourcing support, not a claim of in-house manufacturing.

具体品牌、型号、参数、价格、交期、安装、培训、质保和验收标准,以供应方正式资料、技术协议和合同为准。未确认的“闪蒸”类设备暂不做独立产品承诺。Brand, model, specifications, pricing, lead time, installation, training, warranty and acceptance are subject to formal supplier documents and contracts.