专业词入口Topic Entry

KLayout 打开 GDS 后，先别急着发加工。After opening GDS in KLayout, do not send it out too quickly.

KLayout 很适合查看 GDS/OASIS、做 layer 检查、量尺寸和初步 DRC。但对微纳加工来说，能打开文件不等于能加工；还要确认 top cell、单位、层号、最小尺寸、套刻 mark、有效面积和材料工艺说明。KLayout helps view GDS/OASIS, inspect layers, measure geometry and run basic checks, but an openable file is not automatically fabrication-ready.

01

适合什么需求Good Fit

已有 GDS/OASIS，需要在报价、电子束曝光、光刻、刻蚀、掩膜版或纳米压印母版前做一次提交前检查。For GDS/OASIS review before quotation, EBL, lithography, etch, masks or nanoimprint masters.

02

需要准备什么Prepare First

GDS/OASIS 文件、layer map、目标 top cell、关键尺寸、工艺层用途、对准关系、材料堆栈和一张标注后的截图。GDS/OASIS, layer map, target top cell, CDs, process meaning, overlay relation, stack and annotated screenshots.

03

常见风险Common Risks

top cell 不是最终结构、layer/datatype 没说明、阵列引用丢失、图形小于工艺窗口、mark 被删、版图面积和样品尺寸对不上。Wrong top cell, missing layer/datatype notes, lost array references, too-small geometry, deleted marks or area mismatch.

推荐下一步Next Step

把 GDS、截图和 layer 说明一起发，沟通会快很多。Send GDS, screenshots and layer notes together.

加工方通常不会只靠文件名判断工艺。建议同时给出材料、膜厚、目标工艺、最小线宽/线距、总面积、数量和验收方式。微纳Hub 可以先帮你判断版图是否适合当前路线，还是需要改成 DXF 转 GDS、版图重画、掩膜版或不同曝光方式。Fabricators need material, film thickness, route, CD/space, area, quantity and acceptance method alongside the layout file.

提交 GDS 版图检查需求Submit GDS review request

KLayout 里先看这些Check These First

  • 打开正确的 top cell，并确认引用结构完整。Open the right top cell and confirm references.
  • 核对 database unit、显示单位和实际尺寸。Check database unit, display unit and real dimensions.
  • 逐层确认 layer/datatype，不要只看颜色。Verify layer/datatype, not only colors.
  • 量最小线宽、最小间距、孔径和 mark 尺寸。Measure CD, spacing, holes and mark size.