适合什么需求Good Fit
超透镜、光束整形、偏振转换、光栅耦合器、周期阵列、纳米柱/纳米孔和小批量光学样品验证。Metalenses, beam shaping, polarization optics, grating couplers, periodic arrays and optical sample validation.
专业词入口Topic Entry
超表面加工，先把光学目标翻译成工艺参数。For metasurface fabrication, translate optics into process inputs first.
超表面、超透镜、亚波长光栅和偏振器件通常会同时涉及版图、薄膜、电子束曝光、光刻、刻蚀和 SEM/光学测试。只发一张效果图很难报价，最好先把周期、线宽、结构高度、材料和验收指标说清楚。Metasurfaces, metalenses and subwavelength arrays usually combine layout, films, lithography, etch and metrology.
需要准备什么Inputs Needed
GDS 版图、周期、最小线宽/间距、阵列面积、材料膜厚、目标刻蚀深度、波长、偏振、SEM 和光学测试方式。GDS, period, CD/space, area, film thickness, etch depth, wavelength, polarization and acceptance method.
常见风险Common Risks
大面积写场拼接、剂量漂移、侧壁角度、刻蚀深度偏差、膜层应力、边缘缺陷和仿真参数与实际材料不一致。Stitching, dose drift, sidewall angle, etch-depth error, film stress, edge defects and material mismatch.
推荐下一步Next Step
把 GDS、材料膜厚和验收指标一起发来。Send layout, material stack and acceptance metrics together.
微纳Hub 会先判断适合电子束曝光、激光直写、DUV/Stepper，还是需要拆成母版、压印或多轮工艺验证。若已有仿真结果，也建议附上材料 n/k、结构高度和预期效率。MN Fab Hub can help route the project across EBL, LDW, DUV/Stepper, master fabrication, imprint or staged process validation.
提交超表面加工需求Submit metasurface request