适合什么需求Good For
薄膜沉积前后粗糙度、刻蚀表面损伤、CMP 平坦化、二维材料与纳米结构形貌、微小台阶高度，以及工艺批次对比。Film roughness, etch damage, CMP planarization, 2D materials, nanostructures, small steps and lot comparison.
专业词入口Topic Entry
AFM 表面粗糙度测试，先定义扫描区域、模式与统计口径。AFM surface metrology starts with scan area, mode and statistical definition.
AFM 可用于薄膜与刻蚀表面的三维纳米形貌、Ra/Rq 粗糙度、颗粒和台阶高度分析。可靠验收不能只写“测一下 AFM”，还要固定测点、扫描尺寸、像素、滤波与数据交付口径。AFM measures nanoscale morphology, roughness, particles and step height; comparable results require fixed locations, scan size, sampling and analysis rules.
需要准备什么Prepare First
样品材料和尺寸、目标测点示意、扫描区域与数量、接触或轻敲模式、预期高度范围、Ra/Rq/Sa/Sq 口径、是否需要原始数据。Sample, locations, scan sizes, point count, contact or tapping mode, height range, roughness metrics and raw-data needs.
常见风险Common Risks
探针卷积导致横向尺寸失真、软样品被划伤、污染吸附、不同扫描尺度不可直接比较、倾斜校正或滤波改变粗糙度，以及测点代表性不足。Tip convolution, sample damage, contamination, incomparable scan scales, leveling or filtering bias and poor point representativeness.
推荐下一步Next Step
把“测粗糙度”转换成测点图、扫描矩阵和数据验收表。Translate roughness testing into a location map, scan matrix and data-delivery checklist.
请提交样品照片、材料与表面处理、目标测点、扫描尺寸和数量、预期高度或粗糙度范围、统计指标、是否要截线轮廓与原始文件。微纳Hub 会先判断 AFM、轮廓仪、白光干涉或 SEM 哪种组合更合适。Share the sample, surface history, target locations, scan matrix, expected range, metrics and raw-data needs so AFM can be compared with profilometry, interferometry or SEM.
提交 AFM 测试需求Submit AFM request查看表征与测试导航Open metrology route